Tensile-strained InxGa1-xP membranes for cavity optomechanics

Author(s)
Garrett D. Cole, Pen-Li Yu, Claus Gärtner, Karoline Siquans, Ramon Moghadas Nia, Jonas Schmoele, Jason Hoelscher-Obermaier, Thomas P. Purdy, Witlef Wieczorek, Cindy A. Regal, Markus Aspelmeyer
Abstract

We investigate the optomechanical properties of tensile-strained ternary InxGa1−xP nanomembranes grown on GaAs. This material

system combines the benefits of highly strained membranes, similar to

those based on stoichiometric silicon nitride, with the unique properties of thin-film semiconductor single crystals, as previously demonstrated with suspended GaAs. Here, we employ lattice mismatch in epitaxial growth to impart an intrinsic tensile strain to a monocrystalline thin film (approximately 30 nm thick). These structures exhibit mechanical quality factors of 2 × 106 or beyond at room temperature and 17 K for eigenfrequencies up to 1 MHz, yielding Q × f products of 2 × 1012 Hz for a tensile stress of ∼170 MPa. Incorporating such membranes in a high-finesse Fabry-Perot cavity, we extract an upper limit to the total optical loss (including both absorption and scatter)

of 40 ppm at 1064 nm and room temperature. Further reductions of the In

content of this alloy will enable tensile stress levels of 1 GPa, with

the potential for a significant increase in the Q × f product, assuming

no deterioration in the mechanical loss at this composition and strain

level. This materials system is a promising candidate for the integration of strained semiconductor membrane structures with low-loss semiconductor mirrors and for realizing stacks of membranes for enhanced optomechanical coupling

Organisation(s)
Quantum Optics, Quantum Nanophysics and Quantum Information
External organisation(s)
National Institute of Standards and Technology, Gaithersburg, University of Colorado, Boulder, Max-Planck-Institut für Gravitationsphysik (Albert Einstein Institut)
Journal
Applied Physics Letters
Volume
104
No. of pages
5
ISSN
0003-6951
DOI
https://doi.org/10.1063/1.4879755
Publication date
05-2014
Peer reviewed
Yes
Austrian Fields of Science 2012
103026 Quantum optics
Keywords
Portal url
https://ucrisportal.univie.ac.at/en/publications/27e8ca11-3044-4864-affb-85bf3b7b8a55