High reflectivity high-Q micromechanical Bragg mirror

Author(s)
Hannes Böhm, Sylvain Gigan, Florian Blaser, Anton Zeilinger, Markus Aspelmeyer, Gregor Langer, Dieter Bäuerle, Jared B. Hertzberg, K C Schwab
Abstract

The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-PŽrot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. Œ 2006 American Institute of Physics.

Organisation(s)
External organisation(s)
Johannes Kepler Universität Linz, University of Maryland, College Park
Journal
Applied Physics Letters
Volume
89
No. of pages
3
ISSN
0003-6951
DOI
https://doi.org/10.1063/1.2393000
Publication date
2006
Peer reviewed
Yes
Austrian Fields of Science 2012
103008 Experimental physics
Portal url
https://ucrisportal.univie.ac.at/en/publications/high-reflectivity-highq-micromechanical-bragg-mirror(85f66a01-3c10-4e09-92db-18ae22dcda1e).html